Ghanbari, A. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. SPIE Digital Library.
Cita Chicago (17th ed.)Ghanbari, Abe. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. SPIE Digital Library.
Cita MLA (9th ed.)Ghanbari, Abe. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. SPIE Digital Library.
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