Cita APA (7a ed.)

Ghanbari, A. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. SPIE Digital Library.

Cita Chicago Style (17a ed.)

Ghanbari, Abe. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. SPIE Digital Library.

Cita MLA (9a ed.)

Ghanbari, Abe. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III. SPIE Digital Library.