Friedrich, C. Microlithography and Metrology in Micromachining III. SPIE Digital Library.
Cita Chicago Style (17a ed.)Friedrich, Craig. Microlithography and Metrology in Micromachining III. SPIE Digital Library.
Cita MLA (9a ed.)Friedrich, Craig. Microlithography and Metrology in Micromachining III. SPIE Digital Library.
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