Friedrich, C. Microlithography and Metrology in Micromachining III. SPIE Digital Library.
Chicago-čujuhus (17. p.)Friedrich, Craig. Microlithography and Metrology in Micromachining III. SPIE Digital Library.
MLA-čujuhus (9. p.)Friedrich, Craig. Microlithography and Metrology in Micromachining III. SPIE Digital Library.
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