Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II

Détails bibliographiques
Autres auteurs: Stover, John
Format: Électronique eBook
Langue:anglais
Publié: SPIE Digital Library, 4/1/98
Sujets:
Accès en ligne:Full text available on Research4Life (SPIE Digital Library)
Description
Description:<strong>On-Campus Access Only (IP based access)</strong>
Description matérielle:1 online resource
Format:Mode of access: Internet
ISBN:9780819427144
Accès:Electronic access restricted to authorized AUW faculty, staff and students