Cita APA

Singh, B. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

Citación estilo Chicago

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

Cita MLA

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.