APA (7e ed.) Bronvermelding

Singh, B. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

Chicago (17e ed.) Bronvermelding

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

MLA (9e ed.) Bronvermelding

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

Let op: Deze citaties zijn niet altijd 100% accuraat.