APA citiranje

Singh, B. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

MLA citiranje

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XII. SPIE Digital Library.

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