APA (7th ed.) Citation

Toprac, A. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Toprac, Anthony. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV. SPIE Digital Library.

MLA (9th ed.) Citation

Toprac, Anthony. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV. SPIE Digital Library.

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