Tohutoro APA (7th ed.)

Smith, J. Micromachining and Microfabrication Process Technology IV. SPIE Digital Library.

Tohutoru Kātū Chicago (17th ed.)

Smith, James. Micromachining and Microfabrication Process Technology IV. SPIE Digital Library.

Tohutoro MLA (9th ed.)

Smith, James. Micromachining and Microfabrication Process Technology IV. SPIE Digital Library.

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