APA (7th ed.) Citation

Levinson, H. J. Lithography Process Control. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Lithography Process Control. SPIE Digital Library.

MLA (9th ed.) Citation

Levinson, Harry J. Lithography Process Control. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.