APA (7th ed.) Citation

Singh, B. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

MLA (9th ed.) Citation

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

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