APA (7th ed.) Zitazioa

Singh, B. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

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