APA (7. basım) Alıntı

Singh, B. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

MLA (9th ed.) Atıf

Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.

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