APA (7th ed.) Citation

Conley, W. Advances in Resist Technology and Processing XVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Conley, Willard. Advances in Resist Technology and Processing XVI. SPIE Digital Library.

MLA (9th ed.) Citation

Conley, Willard. Advances in Resist Technology and Processing XVI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.