APA (7th ed.) Citation

Van den Hove, L. Optical Microlithography XII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Van den Hove, Luc. Optical Microlithography XII. SPIE Digital Library.

MLA (9th ed.) Citation

Van den Hove, Luc. Optical Microlithography XII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.