APA (7th ed.) Citation

Ehrfeld, W. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Ehrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.

MLA (9th ed.) Citation

Ehrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.