Ehrfeld, W. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaEhrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
MLA (9th ed.) ZitazioaEhrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
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