APA (7. basım) Alıntı

Ehrfeld, W. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Ehrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.

MLA (9th ed.) Atıf

Ehrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.

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