Ehrfeld, W. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
Chicago Style (17. basım) AtıfEhrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
MLA (9th ed.) AtıfEhrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
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