Mack, C. Lithography for Semiconductor Manufacturing. SPIE Digital Library.
Cita Chicago (17th ed.)Mack, Chris. Lithography for Semiconductor Manufacturing. SPIE Digital Library.
Cita MLA (9th ed.)Mack, Chris. Lithography for Semiconductor Manufacturing. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.