Yallup, K. Process and Equipment Control in Microelectronic Manufacturing. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Yallup, Kevin. Process and Equipment Control in Microelectronic Manufacturing. SPIE Digital Library.
Citatione MLA (9a ed.)Yallup, Kevin. Process and Equipment Control in Microelectronic Manufacturing. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.