Smith, J. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Cita Chicago Style (17a ed.)Smith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Cita MLA (9a ed.)Smith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
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