Smith, J. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Smith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Tohutoro MLA (9th ed.)Smith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
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