Smith, J. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Chicago Style (17. basım) AtıfSmith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
MLA (9th ed.) AtıfSmith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
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