Vladimirsky, Y. Materials and Device Characterization in Micromachining II. SPIE Digital Library.
Cita Chicago (17th ed.)Vladimirsky, Yuli. Materials and Device Characterization in Micromachining II. SPIE Digital Library.
Cita MLA (9th ed.)Vladimirsky, Yuli. Materials and Device Characterization in Micromachining II. SPIE Digital Library.
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