Toprac, A. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V. SPIE Digital Library.
Citação do estilo Chicago (17ª ed.)Toprac, Anthony. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V. SPIE Digital Library.
Citação MLA (9ª ed.)Toprac, Anthony. Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V. SPIE Digital Library.
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