Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V
| Altri autori: | |
|---|---|
| Natura: | Elettronico eBook |
| Lingua: | inglese |
| Pubblicazione: |
SPIE Digital Library,
9/3/99
|
| Soggetti: | |
| Accesso online: | Full text available on Research4Life (SPIE Digital Library) |
| Descrizione del documento: | <strong>On-Campus Access Only (IP based access)</strong> |
|---|---|
| Descrizione fisica: | 1 online resource |
| Natura: | Mode of access: Internet |
| ISBN: | 9780819434791 |
| Accesso: | Electronic access restricted to authorized AUW faculty, staff and students |