APA (7th ed.) Citation

Chau, K. Device and Process Technologies for MEMS and Microelectronics. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Chau, Kevin. Device and Process Technologies for MEMS and Microelectronics. SPIE Digital Library.

MLA (9th ed.) Citation

Chau, Kevin. Device and Process Technologies for MEMS and Microelectronics. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.