APA (7th ed.) Citation

Behringer, U. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.

MLA (9th ed.) Citation

Behringer, Uwe. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.

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