Behringer, U. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Cita Chicago (17th ed.)Behringer, Uwe. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Cita MLA (9th ed.)Behringer, Uwe. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
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