Behringer, U. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Chicago-referens (17:e uppl.)Behringer, Uwe. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
MLA-referens (9:e uppl.)Behringer, Uwe. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
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