APA (7th ed.) Citation

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

MLA (9th ed.) Citation

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.