Cita APA

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

Citación estilo Chicago

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

Cita MLA

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.