APA (7e ed.) Bronvermelding

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

Chicago (17e ed.) Bronvermelding

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

MLA (9e ed.) Bronvermelding

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.

Let op: Deze citaties zijn niet altijd 100% accuraat.