Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.
Chicago Style (17th ed.) CitationSullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.
MLA引文Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XIV. SPIE Digital Library.
警告:這些引文格式不一定是100%准確.