Morimoto, H. Photomask and Next-Generation Lithography Mask Technology VII. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingMorimoto, Hiroaki. Photomask and Next-Generation Lithography Mask Technology VII. SPIE Digital Library.
MLA (9e ed.) BronvermeldingMorimoto, Hiroaki. Photomask and Next-Generation Lithography Mask Technology VII. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.