Morimoto, H. Photomask and Next-Generation Lithography Mask Technology VII. SPIE Digital Library.
Chicago Style (17. basım) AtıfMorimoto, Hiroaki. Photomask and Next-Generation Lithography Mask Technology VII. SPIE Digital Library.
MLA (9th ed.) AtıfMorimoto, Hiroaki. Photomask and Next-Generation Lithography Mask Technology VII. SPIE Digital Library.
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