Micro-Opto-Electro-Mechanical Systems
| Altres autors: | Syms, Richard |
|---|---|
| Format: | Electrònic eBook |
| Idioma: | anglès |
| Publicat: |
SPIE Digital Library,
9/1/00
|
| Matèries: | |
| Accés en línia: | Full text available on Research4Life (SPIE Digital Library) |
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Ítems similars
-
MOEMS: Micro-Opto-Electro-Mechanical Systems
per: Motamedi, Manouchehr - Functional Integration of Opto-Electro-Mechanical Devices and Systems
- Functional Integration of Opto-Electro-Mechanical Devices and Systems II
- Nano-Opto-Mechanical Systems (NOMS)
- Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications