Micro-Opto-Electro-Mechanical Systems
| その他の著者: | Syms, Richard |
|---|---|
| フォーマット: | 電子媒体 eBook |
| 言語: | 英語 |
| 出版事項: |
SPIE Digital Library,
9/1/00
|
| 主題: | |
| オンライン・アクセス: | Full text available on Research4Life (SPIE Digital Library) |
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- Functional Integration of Opto-Electro-Mechanical Devices and Systems II
- Nano-Opto-Mechanical Systems (NOMS)
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