APA (7th ed.) Citation

Karam, J. M. Micromachining and Microfabrication Process Technology VI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Karam, Jean Michel. Micromachining and Microfabrication Process Technology VI. SPIE Digital Library.

MLA (9th ed.) Citation

Karam, Jean Michel. Micromachining and Microfabrication Process Technology VI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.