Vladimirsky, Y. Materials and Device Characterization in Micromachining III. SPIE Digital Library.
Chicago-viite (17. p.)Vladimirsky, Yuli. Materials and Device Characterization in Micromachining III. SPIE Digital Library.
MLA-viite (9. p.)Vladimirsky, Yuli. Materials and Device Characterization in Micromachining III. SPIE Digital Library.
Varoitus: Nämä viitteet eivät aina ole täysin luotettavia.