Vladimirsky, Y. Materials and Device Characterization in Micromachining III. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Vladimirsky, Yuli. Materials and Device Characterization in Micromachining III. SPIE Digital Library.
MLA(9版)引用形式Vladimirsky, Yuli. Materials and Device Characterization in Micromachining III. SPIE Digital Library.
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