Mack, C. Microlithographic Techniques in Integrated Circuit Fabrication II. SPIE Digital Library.
Chicago Style (17th ed.) CitationMack, Chris. Microlithographic Techniques in Integrated Circuit Fabrication II. SPIE Digital Library.
MLA (9th ed.) CitationMack, Chris. Microlithographic Techniques in Integrated Circuit Fabrication II. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.