Dyfyniad APA

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Dyfyniad Arddull Chicago

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Dyfyniad MLA

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Rhybudd: Mae'n bosib nad yw'r dyfyniadau hyn bob amser yn 100% cywir.