Παραπομπή σε μορφή APA (7η εκδ.)

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Παραπομπή σε μορφή Chicago (17η εκδ.)

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Παραπομπή σε μορφή MLA (9th εκδ.)

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.