APA (7th ed.) Zitazioa

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

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