Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.
Chicago-viite (17. p.)Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.
MLA-viite (9. p.)Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.
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