Cita APA

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Citación estilo Chicago

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Cita MLA

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.