APA citiranje

Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

MLA citiranje

Sullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.

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