APA (7th ed.) Citation

Gorecki, C. Microsystems Engineering: Metrology and Inspection. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Gorecki, Christophe. Microsystems Engineering: Metrology and Inspection. SPIE Digital Library.

MLA (9th ed.) Citation

Gorecki, Christophe. Microsystems Engineering: Metrology and Inspection. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.